Title:
X-RAY GENERATION DEVICE, TARGET ADJUSTING METHOD, AND METHOD FOR USING X-RAY GENERATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/188338
Kind Code:
A1
Abstract:
This X-ray generation device comprises: an electron gun; and a target that generates X-rays when being irradiated with electrons emitted from the electron gun. The X-ray generation device comprises a control unit that controls execution of a first mode for thinning the target by irradiating the target with the electrons by means of current adjusted within a first current range and a second mode for generating X-rays by irradiating the target with the electrons by means of current adjusted within a second current range. The lower limit of the first current range is higher than the upper limit of the second current range.
Inventors:
ANDO YOICHI (JP)
Application Number:
PCT/JP2022/016711
Publication Date:
October 05, 2023
Filing Date:
March 31, 2022
Export Citation:
Assignee:
CANON ANELVA CORP (JP)
International Classes:
H01J35/08; H01J35/30
Domestic Patent References:
| WO2020084664A1 | 2020-04-30 |
Foreign References:
| US20110150184A1 | 2011-06-23 | |||
| JP2001126650A | 2001-05-11 | |||
| JPH06124671A | 1994-05-06 | |||
| US20200353288A1 | 2020-11-12 | |||
| JP2001126650A | 2001-05-11 |
Attorney, Agent or Firm:
OHTSUKA PATENT OFFICE, P.C. (JP)
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