Title:
WINDING-TYPE FILM DEPOSITION DEVICE AND WINDING-TYPE FILM DEPOSITION METHOD
Document Type and Number:
WIPO Patent Application WO/2019/230421
Kind Code:
A1
Abstract:
A winding-type film deposition device provided with: a vacuum container; a film running mechanism; a lithium source; and a first roller. The vacuum container is capable of maintaining a decompressed state. The film running mechanism is capable of causing a film to run in the vacuum container. The lithium source is capable of causing lithium to evaporate in the vacuum container. The first roller is disposed between a film deposition surface of the film and the lithium source. The first roller has a transfer pattern for receiving the lithium evaporated from the lithium source. The first roller rotates and transfers a lithium layer pattern corresponding to the transfer pattern onto the film deposition surface.
Inventors:
SAKAMOTO JUNICHI (JP)
SAITO KAZUYA (JP)
KIYOTA JUNYA (JP)
TAKEI MASAKI (JP)
YOKOYAMA AKIHIRO (JP)
SAITO KAZUYA (JP)
KIYOTA JUNYA (JP)
TAKEI MASAKI (JP)
YOKOYAMA AKIHIRO (JP)
Application Number:
PCT/JP2019/019504
Publication Date:
December 05, 2019
Filing Date:
May 16, 2019
Export Citation:
Assignee:
ULVAC INC (JP)
International Classes:
C23C14/04; B41F5/04; B41F9/00; B41F17/10; B41M1/02; B41M1/10; B41M1/28; B41M1/30; B65H20/00; C23C14/02; C23C14/14; C23C14/24; C23C14/56
Domestic Patent References:
WO2008018297A1 | 2008-02-14 | |||
WO2008018297A1 | 2008-02-14 |
Foreign References:
JP2011089160A | 2011-05-06 | |||
JP2014171999A | 2014-09-22 | |||
JP2000508579A | 2000-07-11 | |||
JP2006225710A | 2006-08-31 | |||
CN101880856A | 2010-11-10 | |||
JP2014107148A | 2014-06-09 |
Other References:
See also references of EP 3683333A4
Attorney, Agent or Firm:
OMORI, Junichi (JP)
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