Title:
VACUUM PUMP AND CONTROL DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/095851
Kind Code:
A1
Abstract:
[Problem] To propose: a vacuum pump with which it is possible to ascertain noise resistance etc., of a slave circuit and a master circuit performing control of the operation of each part included in the vacuum pump; and a control device used in such a vacuum pump. [Solution] The present invention comprises a control means 200 for controlling the operation of each part included in a vacuum pump 100, and is characterized in that: the control means 200 includes a slave circuit 201, 202 that is connected to each part and controls the operation of each part, and a master circuit 204 that is connected to the slave circuit 201, 202 and controls the slave circuit 201, 202; and the master circuit 204 periodically communicates with the slave circuit 201, 202 and acquires a history of communication states in the communication.
Inventors:
HONMA RYUTARO (JP)
KASAHARA KAZUYA (JP)
FUKAMI HIDEO (JP)
KASAHARA KAZUYA (JP)
FUKAMI HIDEO (JP)
Application Number:
PCT/JP2022/043432
Publication Date:
June 01, 2023
Filing Date:
November 24, 2022
Export Citation:
Assignee:
EDWARDS JAPAN LTD (JP)
International Classes:
F04D19/04; F04D27/00
Foreign References:
| JP2021055586A | 2021-04-08 | |||
| US6961363B1 | 2005-11-01 | |||
| JP2019022106A | 2019-02-07 | |||
| JP2021055586A | 2021-04-08 |
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