Title:
TREATMENT METHOD AND DEVICE FOR ELECTRONIC-GRADE TETRAETHYL ORTHOSILICATE RETURN STEEL CYLINDER
Document Type and Number:
WIPO Patent Application WO/2023/088171
Kind Code:
A1
Abstract:
A treatment method for an electronic-grade tetraethyl orthosilicate (TEOS) return steel cylinder. A pulse steam washing process is adopted to treat foreign matters in a TEOS return steel cylinder (6). The pulse steam washing process comprises: gasifying an organic solvent to form steam and then pulse-jetting the steam into the TEOS return steel cylinder (6); and condensing on the inner wall of the TEOS return steel cylinder (6), and separating the foreign matters from the inner wall of the TEOS return steel cylinder (6) by means of the thermal expansion and contraction of the foreign matters and the oscillation effect of the pulse. The foreign matters comprise particulate matters and/or liquid in the TEOS return steel cylinder (6).
Inventors:
LI PENGWEI (CN)
PAN HAITAO (CN)
YAO DAN (CN)
QI XIANGQIAN (CN)
SUN MENG (CN)
PAN HAITAO (CN)
YAO DAN (CN)
QI XIANGQIAN (CN)
SUN MENG (CN)
Application Number:
PCT/CN2022/131265
Publication Date:
May 25, 2023
Filing Date:
November 11, 2022
Export Citation:
Assignee:
JINHONG GAS CO LTD (CN)
International Classes:
B08B9/093; B08B3/08; B08B7/00; B08B9/46
Foreign References:
| CN114082731A | 2022-02-25 | |||
| CN211217827U | 2020-08-11 | |||
| CN110420943A | 2019-11-08 | |||
| CN207430855U | 2018-06-01 | |||
| CN206854308U | 2018-01-09 | |||
| JP2003024885A | 2003-01-28 |
Attorney, Agent or Firm:
SUZHOU FLY PATENT AGENCY (GENERAL PARTERNERSHIP) (CN)
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