Title:
THERMOPILE-TYPE SENSOR AND SENSOR ARRAY
Document Type and Number:
WIPO Patent Application WO/2022/239610
Kind Code:
A1
Abstract:
The thermopile-type sensor (1a) of the present disclosure comprises a p-type portion (11) and an n-type portion (12). The p-type portion (11) has a first phononic crystal (11c) in which a plurality of first holes (10h) are lined up in plan view. The n-type portion (12) has a second phononic crystal (12c) in which a plurality of second holes (10h) are lined up in plan view. The p-type portion (11) and the n-type portion (12) constitute a thermocouple (10). The interface scattering frequency of phonons in the first phononic crystal (11c) differs from the interface scattering frequency of phonons in the second phononic crystal (12c). Alternatively, the ratio of the sum of the areas of the plurality of first holes (10h) relative to the area of the first phononic crystal (11c) in plan view differs from the ratio of the sum of the areas of the plurality of second holes (10h) relative to the area of the second phononic crystal (12c) in plan view.
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Inventors:
TAKAHASHI KOUHEI
FUJIKANE MASAKI
TANAKA HIROYUKI
FUJIKANE MASAKI
TANAKA HIROYUKI
Application Number:
PCT/JP2022/018143
Publication Date:
November 17, 2022
Filing Date:
April 19, 2022
Export Citation:
Assignee:
PANASONIC IP MAN CO LTD (JP)
International Classes:
G01J1/02; H01L35/18; H01L35/32
Domestic Patent References:
| WO2020174731A1 | 2020-09-03 | |||
| WO2021079732A1 | 2021-04-29 | |||
| WO2020235118A1 | 2020-11-26 | |||
| WO2019225058A1 | 2019-11-28 |
Foreign References:
| JP2009180682A | 2009-08-13 | |||
| JP2019105624A | 2019-06-27 | |||
| JP2017223644A | 2017-12-21 | |||
| JP2011237256A | 2011-11-24 | |||
| JPH07225152A | 1995-08-22 | |||
| JP2017223644A | 2017-12-21 | |||
| US20150015930A1 | 2015-01-15 |
Other References:
NOMURA ET AL.: "Impeded thermal transport in Si multiscale hierarchical architectures with phononic crystal nanostructures", PHYSICAL REVIEW B, vol. 91, 2015, pages 205422
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, vol. 19, 2009, pages 125029
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, vol. 19, 2009, pages 125029
Attorney, Agent or Firm:
KAMATA Kenji et al. (JP)
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