Title:
SURFACE ACOUSTIC WAVE RESONANCE APPARATUS AND FORMING METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2024/032440
Kind Code:
A1
Abstract:
A surface acoustic wave resonance apparatus and a forming method therefor, which relate to the technical field of semiconductors. The surface acoustic wave resonance apparatus comprises: a piezoelectric substrate; and an electrode structure, which is located on the piezoelectric substrate and comprises a first bus and a second bus, wherein the first bus is connected to a first electrode strip, and the second bus is connected to a second electrode strip; the first electrode strip comprises a first part and a second part, and the second electrode strip comprises a third part and a fourth part; a first spacing area, an overlapping area and a second spacing area are provided between the first bus and the second bus; the second part and the third part are located in the overlapping area, the first part is located in the first spacing area, and the fourth part is located in the second spacing area; and the material densities of the second part and the third part are respectively greater than the material densities of the first part and the fourth part. Therefore, the wave velocity in the overlapping area is reduced, such that the wave velocity difference between the overlapping area and the first spacing area and the wave velocity difference between the overlapping area and the second spacing area are increased, and the leakage of the energy of the resonance apparatus, during operation, from the overlapping area to the first spacing area and the second spacing area is reduced, thereby improving the performance of the resonance apparatus.
More Like This:
| JPS59160307 | ELASTIC SURFACE WAVE FILTER DEVICE |
| JPH05218793 | SURFACE ACOUSTIC WAVE FILTER |
| JPH05304435 | MECHANISM FOR ASSEMBLING SLENDER OBJECT |
Inventors:
YANG XINYU (CN)
TANG ZHENGJIE (CN)
ZOU YALI (CN)
TANG ZHENGJIE (CN)
ZOU YALI (CN)
Application Number:
PCT/CN2023/110750
Publication Date:
February 15, 2024
Filing Date:
August 02, 2023
Export Citation:
Assignee:
CHANGZHOU CHEMSEMI CO LTD (CN)
International Classes:
H03H9/25; H03H3/08; H03H3/10; H03H9/08; H03H9/145
Foreign References:
| CN115037274A | 2022-09-09 | |||
| CN114337588A | 2022-04-12 | |||
| CN113872562A | 2021-12-31 | |||
| CN110268628A | 2019-09-20 | |||
| CN113839642A | 2021-12-24 | |||
| US20180316333A1 | 2018-11-01 |
Attorney, Agent or Firm:
UNITALEN ATTORNEYS AT LAW CO., LTD. (CN)
Download PDF: