SINTERED SILICON NITRIDE OBJECT

Title:

SINTERED SILICON NITRIDE OBJECT

Document Type and Number:

WIPO Patent Application WO/2024/095834

Kind Code:

A1

Abstract:

This sintered silicon nitride object contains at least one element selected from the group consisting of Ti, Ge, Zr, Ag, Ba, and Hf in a concentration of 0.01-0.15 mass% as a solute in the silicon nitride particles constituting the sintered object.　The present invention can provide a sintered silicon nitride object which decreases far less in volume resistivity from room temperature to high temperatures than conventional sintered silicon nitride objects.

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Inventors:

ISHIMOTO RYUJI (JP)
KUSANO DAI (JP)

Application Number:

PCT/JP2023/038378

Publication Date:

May 10, 2024

Filing Date:

October 24, 2023

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Assignee:

TOKUYAMA CORP (JP)

International Classes:

C04B35/591; H01L23/15

Attorney, Agent or Firm:

TAGUCHI, Masahiro et al. (Toranomon ES Bldg. 8F. 25-2, Toranomon 3-chome, Minato-k, Tokyo 01, JP)

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