Title:
RUTHENIUM ORGANOMETALLIC COMPOUND, METHOD FOR PREPARING SAME, AND METHOD FOR MANUFACTURING THIN FILM USING SAME
Document Type and Number:
WIPO Patent Application WO/2023/013949
Kind Code:
A1
Abstract:
The present invention relates to a ruthenium organometallic compound, a method for preparing same, and a method for manufacturing a thin film using same and, more specifically, to a ruthenium organometallic compound, a method for preparing same, and a method for manufacturing a thin film using same, in which, in manufacturing a thin film through chemical vapor deposition or a solution process, a ruthenium thin film or ruthenium oxide thin film having improved thermal stability and volatility and good quality can be easily manufactured at a low temperature.
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Inventors:
CHUNG TAEK MO (KR)
RYU JI YEON (KR)
EOM TAEYONG (KR)
KIM CHANG GYOUN (KR)
PARK BO KEUN (KR)
PARK CHAN WOO (KR)
KIM SEONAH (KR)
HWANG JEONG MIN (KR)
RYU JI YEON (KR)
EOM TAEYONG (KR)
KIM CHANG GYOUN (KR)
PARK BO KEUN (KR)
PARK CHAN WOO (KR)
KIM SEONAH (KR)
HWANG JEONG MIN (KR)
Application Number:
PCT/KR2022/010925
Publication Date:
February 09, 2023
Filing Date:
July 26, 2022
Export Citation:
Assignee:
KOREA RES INST CHEMICAL TECH (KR)
MECARO CO LTD (KR)
MECARO CO LTD (KR)
International Classes:
C07F15/00; C07F17/00; C23C16/18; C23C16/40; C23C16/455
Foreign References:
| KR101468238B1 | 2014-12-03 | |||
| US20160258054A1 | 2016-09-08 |
Other References:
HWANG JEONG MIN, HAN SEUNG-MIN, YANG HANUEL, YEO SEUNGMIN, LEE SEUNG-HUN, PARK CHAN WOO, KIM GUN HWAN, PARK BO KEUN, BYUN YOUNGHUN: "Atomic layer deposition of a ruthenium thin film using a precursor with enhanced reactivity", JOURNAL OF MATERIALS CHEMISTRY C, ROYAL SOCIETY OF CHEMISTRY, GB, vol. 9, no. 11, 25 March 2021 (2021-03-25), GB , pages 3820 - 3825, XP093031478, ISSN: 2050-7526, DOI: 10.1039/D0TC05682K
MÜLLER J., SCHMITT S: "Kationische π-olefin-ruthenium-komplexe", JOURNAL OF ORGANOMETALLIC CHEMISTRY, vol. 97, 16 September 1975 (1975-09-16), pages 275 - 282, XP093031480, DOI: 10.1016/S0022-328X(00)89474-7
KIMURA, M. ET AL.: "Isolation of (η5-Cyclopentadienyl)(1,2,3,4,5-η6-exo-methoxy-7-oxo-2,4-cycloheptadienyl)ruthenium(II) as a key Intermediate for the Selective H/D exchange on its coordinated tropone moiety by KOH/CD3OD", BULLETIN OF THE CHEMICAL SOCIETY OF JAPAN, CHEMICAL SOCIETY OF JAPAN,NIPPON KAGAKUKAI, JP, vol. 66, no. 10, 1 January 1993 (1993-01-01), JP , pages 3120 - 3123, XP009543087, ISSN: 0009-2673, DOI: 10.1246/bcsj.66.3120
SUTHERLAND RONALD G., PIORKO ADAM, LEE CHOI CHUCK: "(Tropone)- and (tropothione)iron complexes from ring expansion reactions", ORGANOMETALLICS, AMERICAN CHEMICAL SOCIETY, vol. 3, no. 2, 1 February 1984 (1984-02-01), pages 331 - 332, XP093031487, ISSN: 0276-7333, DOI: 10.1021/om00080a032
PITTRACHER MICHAEL, FRISCH ULLA, KOPACKA HOLGER, WURST KLAUS, MÜLLER THOMAS, OEHNINGER LUCIANO, OTT INGO, WUTTKE EVELYN, SCHEERER : "π-Complexes of Tropolone and Its N-Derivatives: Ambidentate [O,O]/[N,O]/[N,N]-Cycloheptatrienyl Pentamethylcyclopentadienyl Ruthenium Sandwich Complexes", ORGANOMETALLICS, AMERICAN CHEMICAL SOCIETY, vol. 33, no. 7, 14 April 2014 (2014-04-14), pages 1630 - 1643, XP093031488, ISSN: 0276-7333, DOI: 10.1021/om401200t
MÜLLER J., SCHMITT S: "Kationische π-olefin-ruthenium-komplexe", JOURNAL OF ORGANOMETALLIC CHEMISTRY, vol. 97, 16 September 1975 (1975-09-16), pages 275 - 282, XP093031480, DOI: 10.1016/S0022-328X(00)89474-7
KIMURA, M. ET AL.: "Isolation of (η5-Cyclopentadienyl)(1,2,3,4,5-η6-exo-methoxy-7-oxo-2,4-cycloheptadienyl)ruthenium(II) as a key Intermediate for the Selective H/D exchange on its coordinated tropone moiety by KOH/CD3OD", BULLETIN OF THE CHEMICAL SOCIETY OF JAPAN, CHEMICAL SOCIETY OF JAPAN,NIPPON KAGAKUKAI, JP, vol. 66, no. 10, 1 January 1993 (1993-01-01), JP , pages 3120 - 3123, XP009543087, ISSN: 0009-2673, DOI: 10.1246/bcsj.66.3120
SUTHERLAND RONALD G., PIORKO ADAM, LEE CHOI CHUCK: "(Tropone)- and (tropothione)iron complexes from ring expansion reactions", ORGANOMETALLICS, AMERICAN CHEMICAL SOCIETY, vol. 3, no. 2, 1 February 1984 (1984-02-01), pages 331 - 332, XP093031487, ISSN: 0276-7333, DOI: 10.1021/om00080a032
PITTRACHER MICHAEL, FRISCH ULLA, KOPACKA HOLGER, WURST KLAUS, MÜLLER THOMAS, OEHNINGER LUCIANO, OTT INGO, WUTTKE EVELYN, SCHEERER : "π-Complexes of Tropolone and Its N-Derivatives: Ambidentate [O,O]/[N,O]/[N,N]-Cycloheptatrienyl Pentamethylcyclopentadienyl Ruthenium Sandwich Complexes", ORGANOMETALLICS, AMERICAN CHEMICAL SOCIETY, vol. 33, no. 7, 14 April 2014 (2014-04-14), pages 1630 - 1643, XP093031488, ISSN: 0276-7333, DOI: 10.1021/om401200t
Attorney, Agent or Firm:
GHONG-GAN INTERNATIONAL PATENT LAW FIRM (KR)
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