RESONANCE DEVICE AND METHOD FOR MANUFACTURING SAME

WIPO Patent Application WO/2024/009555

A1

A resonance device (1) comprises: a resonator (10) that has a vibrating part (110), a retention part (140) disposed at least in a portion of the surroundings of the vibrating part (110), and a supporting arm (150) that connects the vibrating part (110) and the retention part (140); and a first substrate (30) that includes a first bottom plate (32) provided so as to be spaced apart from the vibrating part (110) in the thickness direction and a first lateral wall (33) extending toward the retention part (140) from an edge of the first bottom plate (32). The vibrating part (110) comprises: a base end-side section having a vibrating arm (121A) which is configured to be capable of performing out-of-plane bending vibration. The leading end (122A) of the vibrating arm (121A) has: a base end-side portion in which a surface facing the first bottom plate (32) is formed from a metallic film (125A); and a leading end-side portion which is positioned closer to an open-end side as compared with the base end-side portion and in which a surface facing the first bottom plate (32) is formed from silicon.

FUKUMITSU MASAKAZU (JP)
HIGUCHI YOSHIYUKI (JP)
ENDOU FUMIYA (JP)

PCT/JP2023/007204

January 11, 2024

February 28, 2023

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MURATA MANUFACTURING CO (JP)

H03H9/24; H03H3/007; H03H3/04

WO2019064662A1	2019-04-04
WO2021215037A1	2021-10-28

JP2001141461A	2001-05-25
JP2022530730A	2022-07-01
JP2022124598A	2022-08-26

INABA, Yoshiyuki et al. (JP)

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