Title:
QUANTUM COMPUTING DEVICE AND METHOD FOR MANUFACTURING QUANTUM COMPUTING DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/132063
Kind Code:
A1
Abstract:
A quantum computing device (10) comprises: a first substrate (30) having a through-hole (32A, 32B); a qubit element (20) formed on a first surface (S1) of the substrate (30); a cover (50) covering the first surface (S1) side of the first substrate (30); and a second substrate (40) provided on a second surface (S2) side of the first substrate (30) opposite the first surface (S1) side, and closing an opening end of the through-hole (32A, 32B) on the second surface (S2) side. A sealed space (51) surrounding the qubit element (20) and communicating with the through-hole (32A, 32B) is provided between the first surface (S1) and the cover (50).
Inventors:
TAKAHASHI TSUYOSHI (JP)
Application Number:
PCT/JP2022/000384
Publication Date:
July 13, 2023
Filing Date:
January 07, 2022
Export Citation:
Assignee:
FUJITSU LTD (JP)
International Classes:
H01L39/22; H01L39/02; H01L39/24
Foreign References:
| US20180013052A1 | 2018-01-11 | |||
| JP2021072351A | 2021-05-06 | |||
| JP2019532505A | 2019-11-07 | |||
| JPH11177157A | 1999-07-02 | |||
| JPH04338683A | 1992-11-25 |
Attorney, Agent or Firm:
NAKAJIMA, Jun et al. (JP)
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