Title:
PURGE PIN CYLINDER
Document Type and Number:
WIPO Patent Application WO/2023/210927
Kind Code:
A1
Abstract:
A purge pin cylinder according to an embodiment comprises: a socket unit having one side coupled to a conduit; a gas injection pipe which is connected to the socket unit and transfers purge gas into the socket unit; a purge bushing which is provided inside the socket unit and forms a vortex in the purge gas supplied from the gas injection pipe; and a piston unit which is coupled to the socket unit and controls the flow rate of the purge gas flowing from the gas injection pipe to the purge bushing.
Inventors:
PARK JONG MIN (KR)
Application Number:
PCT/KR2023/000924
Publication Date:
November 02, 2023
Filing Date:
January 19, 2023
Export Citation:
Assignee:
J&MI CO LTD (KR)
International Classes:
G01L19/00; B08B9/032; H01L21/67
Foreign References:
| KR102203404B1 | 2021-01-15 | |||
| JP2014074435A | 2014-04-24 | |||
| JP2007170639A | 2007-07-05 | |||
| KR101578513B1 | 2015-12-17 | |||
| US20040129301A1 | 2004-07-08 |
Attorney, Agent or Firm:
YOON, Eui-Seoup (KR)
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