Title:
PULSED VACUUM ULTRAVIOLET LAMP WITH ADJUSTABLE PULSE WIDTH
Document Type and Number:
WIPO Patent Application WO/2023/060895
Kind Code:
A9
Abstract:
A pulsed vacuum ultraviolet lamp with an adjustable pulse width, the pulsed vacuum ultraviolet lamp being composed of a solid state relay (1), a 2650 kHz radio frequency generator (5), a coupler, and a plasma discharge chamber (12). The plasma discharge chamber (12) is composed of a quartz lamp tube (10), a metal bulb (11), a lithium fluoride or magnesium fluoride window sheet (13), a window sheet fixing cap (14), a quartz lamp tube fixing disk (17), a quartz lamp tube sealing ring (18), and a window sheet sealing ring (19). The coupler is composed of a coupler support rod (7), a ferrite core (8), and an excitation coil (9). The quartz lamp tube (10) is located in the center of the plasma discharge chamber (12), the coupler is placed in the quartz lamp tube (10), and the lithium fluoride or magnesium fluoride window sheet (13) is mounted at a vacuum ultraviolet light output end of the plasma discharge chamber (12). The 2650 kHz radio frequency generator (5) is connected to a 220V/110V power socket by means of the solid state relay (1), and the operating state of the solid state relay (1) is controlled by a 3-10V pulsed voltage. A radio frequency current generated by the radio frequency generator (5) flows through the coupler to excite luminescent medium gas in the plasma discharge chamber (12), so as to form plasma and thus generate vacuum ultraviolet light. The generated vacuum ultraviolet light is output through the lithium fluoride or magnesium fluoride window sheet (13). The pulse width of pulsed vacuum ultraviolet light is determined by the pulse width of the 3-10V pulsed voltage that controls the solid state relay (1), thereby forming the pulsed vacuum ultraviolet light having an adjustable pulse width.
Inventors:
SHU JINIAN (CN)
CHENG SHIYU (CN)
YANG BO (CN)
ZHANG ZUOJIAN (CN)
LI ZHEN (CN)
CHENG SHIYU (CN)
YANG BO (CN)
ZHANG ZUOJIAN (CN)
LI ZHEN (CN)
Application Number:
PCT/CN2022/093726
Publication Date:
June 08, 2023
Filing Date:
May 19, 2022
Export Citation:
Assignee:
UNIV CAS (CN)
International Classes:
H01J61/30; H01J61/36
Attorney, Agent or Firm:
QINGDAO FIRST PATENT & TRADEMARK AGENT CO., LTD. (CN)
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