Title:
PULSED LASER DIRECT WRITING TECHNOLOGY-BASED HIGH-DENSITY THERMOELECTRIC THICK FILM DEVICE DESIGN AND PREPARATION METHOD
Document Type and Number:
WIPO Patent Application WO/2022/237149
Kind Code:
A1
Abstract:
The present invention relates to a pulsed laser direct writing technology-based high-density thermoelectric thick film device design and preparation method. On a metallized substrate, alternately arranged high-aspect-ratio rectangular n- and p-type thermoelectric materials are deposited, metal electrodes and the thermoelectric materials on the substrate are patterned respectively by using pulsed laser direct writing technology, and a complete thermoelectric device is obtained by preparing a support layer and an upper electrode in a specific region. According to the present invention, ultrafast pulsed laser direct writing technology is applied to the processing of a thermoelectric thick film device for the first time, the processing of a micron-level thermopile array structure can be achieved, thereby effectively improving the integration level and output performance of the device. In combination with the "L"-shaped structure design of the edge of the electrode of the device provided in the present invention, the same type of thermopiles can be arranged adjacently in an entire column, and the laser direct writing process of thermopiles and an electrode multi-layer structure having different patterns has high adaptability, thereby effectively achieving in-situ integrated processing. The device integration method of the present invention has strong compatibility, controllability and high efficiency in each process link, and has the potential of large-scale low-cost production.
More Like This:
Inventors:
ZHU WEI (CN)
ZHOU JIE (CN)
DENG YUAN (CN)
YU YUEDONG (CN)
HU SHAOXIONG (CN)
ZHOU JIE (CN)
DENG YUAN (CN)
YU YUEDONG (CN)
HU SHAOXIONG (CN)
Application Number:
PCT/CN2021/137056
Publication Date:
November 17, 2022
Filing Date:
December 10, 2021
Export Citation:
Assignee:
UNIV BEIHANG (CN)
International Classes:
H01L35/34; H01L35/32
Foreign References:
| CN113241399A | 2021-08-10 | |||
| CN111446358A | 2020-07-24 | |||
| CN1218998A | 1999-06-09 | |||
| CN1190492A | 1998-08-12 | |||
| US20090090409A1 | 2009-04-09 |
Other References:
YU YUEDONG, ZHU WEI, WANG YALING, ZHU PENGCHENG, PENG KANG, DENG YUAN: "Towards high integration and power density: Zigzag-type thin-film thermoelectric generator assisted by rapid pulse laser patterning technique", APPLIED ENERGY., ELSEVIER SCIENCE PUBLISHERS., GB, vol. 275, 1 October 2020 (2020-10-01), GB , pages 115404, XP093003974, ISSN: 0306-2619, DOI: 10.1016/j.apenergy.2020.115404
Attorney, Agent or Firm:
BEIJING INNOTECH INTELLECTUAL PROPERTY AGENCY (CN)
Download PDF:
Previous Patent: EXERCISE STEP COUNTING METHOD AND APPARATUS, AND AIR TREATMENT DEVICE
Next Patent: MAGNETIC DRUM AND MAGNETIC ENCODER COMPRISING SAME
Next Patent: MAGNETIC DRUM AND MAGNETIC ENCODER COMPRISING SAME