Title:
PRESSURE METER
Document Type and Number:
WIPO Patent Application WO/2020/079773
Kind Code:
A1
Abstract:
A pressure meter (1A, 1B) has: an outer container (20) for defining an outer chamber (21) set to a reference pressure (Pr); an inner container (30) disposed within the outer container (20); and a tube (10) for setting the inside of a first inner chamber (31) of the inner container (30) to a measurement pressure (Px). The inner container (30) has a cylindrical rigid wall section (33), first and second pressure receiving plates (34A, 34B) displaced by the difference between the reference pressure and the measurement pressure; a bellows (38) for separating the inner container (30) into the first inner chamber and a second inner chamber (32); and a pressure detection element(39) for detecting the measurement pressure on the basis of the displacement of the first and second pressure receiving plates and disposed in the second inner chamber. The outer chamber and the second inner chamber are set to the reference pressure which is a high vacuum pressure lower than the lower limit of the measurement pressure.
Inventors:
HOJOH HISAO (JP)
Application Number:
PCT/JP2018/038643
Publication Date:
April 23, 2020
Filing Date:
October 17, 2018
Export Citation:
Assignee:
QZ CORP (JP)
International Classes:
G01L19/04; G01L7/06; G01L9/08; G01L21/00
Domestic Patent References:
| WO2018127987A1 | 2018-07-12 | |||
| WO2018127987A1 | 2018-07-12 |
Foreign References:
| JP2010203977A | 2010-09-16 | |||
| JP2011013190A | 2011-01-20 | |||
| US4691574A | 1987-09-08 |
Other References:
See also references of EP 3845881A4
Attorney, Agent or Firm:
INOUE Hajime et al. (JP)
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