Title:
POLISHING MACHINE, ADJUSTMENT TOOL, AND GAP ADJUSTMENT METHOD
Document Type and Number:
WIPO Patent Application WO/2023/273644
Kind Code:
A1
Abstract:
A polishing machine (100), an adjustment tool (200), and a gap adjustment method. The polishing machine (100) comprises: a body (110), at least one working assembly (300), and a pad removal assistance apparatus (400) correspondingly provided with respect to each working assembly (300); the pad removal assistance apparatus (400) comprises a connection assembly (101) and a motion assembly (102); the connection assembly (101) is connected to the body (110); the motion assembly (102) is connected to the connection assembly (101) and can reciprocatingly move with respect to the connection assembly (101); the motion assembly (102) comprises a recovered state and a pushed-out state; when the motion assembly (102) is in the pushed-out state, the motion assembly is in contact with the working assembly (300) to assist pad removal; the relative position between the connection assembly (101) and the body (110) can be adjusted; and when the motion assembly (102) is in the recovered state, the gap between the motion assembly and the corresponding working assembly (300) can be adjusted.
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Inventors:
LI ZHEN (CN)
WANG TAO (CN)
JIANG TINGFENG (CN)
QIN BAOXING (CN)
CHENG HAOTIAN (CN)
WANG TAO (CN)
JIANG TINGFENG (CN)
QIN BAOXING (CN)
CHENG HAOTIAN (CN)
Application Number:
PCT/CN2022/092943
Publication Date:
January 05, 2023
Filing Date:
May 16, 2022
Export Citation:
Assignee:
SHANGHAI GAUSSIAN AUTOMATION TECH DEVELOPMENT CO LTD (CN)
International Classes:
A47L11/14; A47L11/40; B24B29/02
Foreign References:
CN113520223A | 2021-10-22 | |||
CN112428124A | 2021-03-02 | |||
CN104551984A | 2015-04-29 | |||
CN110039621A | 2019-07-23 | |||
CN211967092U | 2020-11-20 | |||
CN205996563U | 2017-03-08 | |||
CN202465164U | 2012-10-03 | |||
CN1601137A | 2005-03-30 | |||
CN107775569A | 2018-03-09 | |||
JP2010194625A | 2010-09-09 |
Attorney, Agent or Firm:
BEYOND ATTORNEYS AT LAW (CN)
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