Title:
PMUT STRUCTURE PROVIDED WITH MASS BLOCK AND ELECTRONIC DEVICE COMPRISING SAME
Document Type and Number:
WIPO Patent Application WO/2024/093470
Kind Code:
A1
Abstract:
The present invention relates to a PMUT structure provided with a first gap portion and an electronic device comprising same. The PMUT structure comprises: a substrate provided with at least one cavity; at least one PMUT corresponding to the at least one cavity, wherein the PMUT comprises a first electrode layer, a piezoelectric layer and a second electrode layer, and the first electrode layer and the second electrode layer are arranged on one side and the other side of the piezoelectric layer, respectively; and at least one mass block corresponding to the at least one cavity, arranged on the PMUT and opposite to the corresponding cavity position. According to the PMUT structure, the frequency of the PMUT can be adjusted under the condition that the overall shape and size of the PMUT are not changed and the acoustic performance of the PMUT is not affected, so as to obtain a PMUT array having a large bandwidth and good acoustic performance.
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Inventors:
PANG WEI (CN)
NIU PENGFEI (CN)
ZHANG MENGLUN (CN)
NIU PENGFEI (CN)
ZHANG MENGLUN (CN)
Application Number:
PCT/CN2023/115185
Publication Date:
May 10, 2024
Filing Date:
August 28, 2023
Export Citation:
Assignee:
GUANGZHOU LEYI INVEST CO LTD (CN)
International Classes:
H03H9/15
Attorney, Agent or Firm:
BEIJING JINCHENGTONGDA & NEAL LAW FIRM (China World Tower ANo. 1 Jianguo Menwai Avenu, Chaoyang District Beijing 4, CN)
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