Title:
PLASMA SOURCE, AND ATOMIC CLOCK EMPLOYING SAID PLASMA SOURCE
Document Type and Number:
WIPO Patent Application WO/2022/264603
Kind Code:
A1
Abstract:
According to the present invention, a small plasma source that enables highly efficient discharge in an ultra-high vacuum state comprises: a first magnet; a second magnet disposed such that a second magnetic pole thereof faces a first magnetic pole of the first magnet; a third magnet disposed such that a second magnetic pole thereof faces in the same direction as the orientation of the first magnetic pole of the first magnet, and disposed so as to surround the first magnet; a fourth magnet disposed such that a first magnetic pole thereof, different from the second magnetic pole of the third magnet, faces said second magnetic pole, and disposed so as to surround the second magnet; a first electrode provided on the side of the first magnetic pole of the first magnet and the second magnetic pole of the third magnet; a second electrode provided facing the first electrode, on the side of the second magnetic pole of the second magnet and the first magnetic pole of the fourth magnet; and a third electrode disposed between the first electrode and the second electrode. A value obtained by dividing the shorter of the distance between the first magnet and the second magnet and the distance between the third magnet and the fourth magnet by the average value of the thicknesses of the first to fourth magnets is at least equal to 1 and at most equal to 10.
Inventors:
KURASHIMA YUUICHI (JP)
MOTOMURA TAISEI (JP)
YANAGIMACHII SHINYA (JP)
TAKAGI HIDEKI (JP)
HIGURASHI EIJI (JP)
MATSUMAE TAKASHI (JP)
MOTOMURA TAISEI (JP)
YANAGIMACHII SHINYA (JP)
TAKAGI HIDEKI (JP)
HIGURASHI EIJI (JP)
MATSUMAE TAKASHI (JP)
Application Number:
PCT/JP2022/013803
Publication Date:
December 22, 2022
Filing Date:
March 24, 2022
Export Citation:
Assignee:
AIST (JP)
International Classes:
G04F5/14; H01J41/18; H05H1/24
Foreign References:
| JP2011003425A | 2011-01-06 | |||
| JP2016012501A | 2016-01-21 | |||
| JP2016513787A | 2016-05-16 | |||
| JP2006511921A | 2006-04-06 | |||
| JPH0592953U | 1993-12-17 | |||
| US20110233397A1 | 2011-09-29 | |||
| JP2020026559A | 2020-02-20 | |||
| JPS63303065A | 1988-12-09 |
Other References:
T. GRZEBYK ET AL.: "MEMS ion-sorption high vacuum pump", JOURNAL OF PHYSICS: CONFERENCE SERIES, vol. 773, 2016
T. GRZEBYK ET AL.: "Magnetron-like miniature ion source", VACUUM, vol. 151, 2018, pages 167 - 174
T. GRZEBYK ET AL.: "Magnetron-like miniature ion source", VACUUM, vol. 151, 2018, pages 167 - 174
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