Title:
PIEZOELECTRIC MEMS LOUDSPEAKER
Document Type and Number:
WIPO Patent Application WO/2024/065905
Kind Code:
A1
Abstract:
The present invention provides a piezoelectric MEMS loudspeaker. The loudspeaker comprises: a substrate, which has a cavity; a vibration structure, comprising a structural layer, a piezoelectric composite layer, and a flexible layer; the structural layer comprises a structural plate, a structure securing portion, and a plurality of structural springs having slits; the piezoelectric composite layer comprises a piezoelectric film, a first electrode layer, and a second electrode layer; wherein a region where the piezoelectric film, the first electrode layer, and the second electrode layer respectively overlap one another in an orthographic projection onto the substrate acts as a piezoelectric driving functional area; the flexible layer is spaced apart from the structural layer in the direction in which each of the layers of the vibration structure are stacked, and the orthographic projection of the flexible layer completely covers the slits of the plurality of structural springs. In the present invention, stress in the piezoelectric composite layer can be released through the elasticity of the structural springs, while simultaneously ensuring the rigidity of the overall structure without causing the rigidity of the overall structure to be too low, thereby improving the sound pressure level of the piezoelectric MEMS loudspeaker and reducing harmonic distortion, so as to improve the performance of the piezoelectric MEMS loudspeaker.
Inventors:
SHEN YU (CN)
DAN QIANG (CN)
ZHOU YIWEI (CN)
LI YANG (CN)
DAN QIANG (CN)
ZHOU YIWEI (CN)
LI YANG (CN)
Application Number:
PCT/CN2022/126561
Publication Date:
April 04, 2024
Filing Date:
October 21, 2022
Export Citation:
Assignee:
AAC KAITAI TECH WUHAN CO LTD (CN)
International Classes:
H04R17/00
Foreign References:
| CN111147998A | 2020-05-12 | |||
| CN110052391A | 2019-07-26 | |||
| CN111182430A | 2020-05-19 | |||
| CN211656372U | 2020-10-09 | |||
| US20210204067A1 | 2021-07-01 |
Attorney, Agent or Firm:
SHENZHEN JUNXINCHENG INTELLECTUAL PROPERTY FIRM (GENERAL PARTNERSHIP) (CN)
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