Title:
ORGANOMAGNESIUM COMPOUND AND ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/029620
Kind Code:
A1
Abstract:
The present application provides an organomagnesium compound having a structure represented by the following structural formula (1): the organomagnesium compound is a liquid in a working state, has a stable high saturation vapor pressure, and is very suitable as a magnesium dopant source for semiconductor doping; in a magnesium source process, magnesium components are evenly distributed, which improves epitaxy uniformity and production process stability, and is suitable for large-scale substrate epitaxy; in addition, the vapor pressure is also very stable at the end of the use of the magnesium source, which improves use efficiency and gallium production rate, reduces production costs, and is suitable for mass production.
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Inventors:
YANG MIN (CN)
XU YAOZHONG (CN)
FAN GUANGHUA (CN)
LI FANGFANG (CN)
LIU ZIWEI (CN)
XU TAO (CN)
SHEN BO (CN)
XU YAOZHONG (CN)
FAN GUANGHUA (CN)
LI FANGFANG (CN)
LIU ZIWEI (CN)
XU TAO (CN)
SHEN BO (CN)
Application Number:
PCT/CN2022/095625
Publication Date:
March 09, 2023
Filing Date:
May 27, 2022
Export Citation:
Assignee:
JIANGSU NANDA PHOTOELECTRIC MAT CO LTD (CN)
International Classes:
C07F3/02; H01L33/32
Foreign References:
| CN113461717A | 2021-10-01 | |||
| CN112004959A | 2020-11-27 | |||
| CN1399006A | 2003-02-26 | |||
| JP2007254408A | 2007-10-04 |
Attorney, Agent or Firm:
SUZHOU XINZHIXING INTELLECTUAL PROPERTY AGENT FIRM (SPECIAL GENERAL PARTNERSHIP) (CN)
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