Title:
OPTICAL FILTERING DEVICE, METHOD FOR CONTROLLING OPTICAL FILTERING DEVICE, AND MEMS SHUTTER
Document Type and Number:
WIPO Patent Application WO/2022/201459
Kind Code:
A1
Abstract:
Provided is an optical filtering device used as a spatial filter for an optical inspection apparatus, wherein the optical filtering device is highly reliable and is capable of preventing sticking of a shutter to a wall surface of a shutter opening. The present invention is characterized by comprising a shutter capable of opening and closing by voltage control, and a substrate having a shutter opening that serves as the range of motion of the shutter, the substrate having a sticking prevention part that prevents the shutter from sticking to a wall surface of the shutter opening when the shutter is open.
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Inventors:
YOSHIMURA YASUHIRO (JP)
KANAMARU MASATOSHI (JP)
AONO TAKANORI (JP)
TOMOTSUNE HITOYUKI (JP)
OTANI YUKO (JP)
KANZAKI NOBUHIKO (JP)
KANAMARU MASATOSHI (JP)
AONO TAKANORI (JP)
TOMOTSUNE HITOYUKI (JP)
OTANI YUKO (JP)
KANZAKI NOBUHIKO (JP)
Application Number:
PCT/JP2021/012664
Publication Date:
September 29, 2022
Filing Date:
March 25, 2021
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
G02B26/02
Domestic Patent References:
| WO2012105705A1 | 2012-08-09 |
Foreign References:
| JPH11249035A | 1999-09-17 | |||
| JPH09218360A | 1997-08-19 | |||
| JPS62289807A | 1987-12-16 | |||
| US20170075105A1 | 2017-03-16 | |||
| JP2002517320A | 2002-06-18 | |||
| JP2005153057A | 2005-06-16 | |||
| JP2003315698A | 2003-11-06 | |||
| US5784190A | 1998-07-21 |
Attorney, Agent or Firm:
POLAIRE I.P.C. (JP)
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