Title:
OPTICAL DEVICE, OPTICAL PROCESSING DEVICE, OPTICAL PROCESSING METHOD, AND CORRECTION MEMBER
Document Type and Number:
WIPO Patent Application WO/2024/084694
Kind Code:
A1
Abstract:
This optical device is used for an optical processing device and is provided with: a deformable mirror (117) that a plurality of processing beams (ELs) from a processing light source (10) enter and that modifies the wavefront of the beam cross section of each of the plurality of processing beams (ELs); and a galvanomirror (161) that changes the traveling direction of the plurality of processing beams (ELs) from the deformable mirror (117) to change the positions where the processing beams (ELs) passing through an objective optical system (170) hit a workpiece (W).
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Inventors:
NEGISHI TAKETOSHI (JP)
ARAI MASANORI (JP)
ARAI MASANORI (JP)
Application Number:
PCT/JP2022/039339
Publication Date:
April 25, 2024
Filing Date:
October 21, 2022
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
B23K26/064
Domestic Patent References:
| WO2020050379A1 | 2020-03-12 | |||
| WO2022180808A1 | 2022-09-01 |
Foreign References:
| JP2015213951A | 2015-12-03 | |||
| JP2020163472A | 2020-10-08 | |||
| JP2019144426A | 2019-08-29 | |||
| JP2021079394A | 2021-05-27 |
Attorney, Agent or Firm:
OHNISHI, Shogo et al. (JP)
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