Title:
NOVEL MOLYBDENUM COMPOUND, METHOD OF PRODUCING THE SAME, AND METHOD OF PRODUCING MOLYBDENUM-CONTAINING THIN FILM INCLUDING THE SAME
Document Type and Number:
WIPO Patent Application WO/2024/019487
Kind Code:
A1
Abstract:
Provided are a molybdenum compound, a method of producing the same, and a method of producing a molybdenum-containing thin film including the compound, and since the novel molybdenum compound shows excellent thermal stability and vapor pressure properties, a thin film using the same may show uniform and excellent electrical properties.
Inventors:
HAN MI JUNG (KR)
LEE KANG YONG (KR)
KIM YOUNG JIN (KR)
LIM JIN MOOK (KR)
SONG HAN SANG (KR)
LEE KANG YONG (KR)
KIM YOUNG JIN (KR)
LIM JIN MOOK (KR)
SONG HAN SANG (KR)
Application Number:
PCT/KR2023/010314
Publication Date:
January 25, 2024
Filing Date:
July 18, 2023
Export Citation:
Assignee:
M CHEMICALS INC (KR)
International Classes:
C07F11/00; C23C16/18; C23C16/455
Domestic Patent References:
| WO1993022472A1 | 1993-11-11 |
Foreign References:
| KR101306811B1 | 2013-09-10 | |||
| KR101485522B1 | 2015-01-28 | |||
| KR20220009909A | 2022-01-25 |
Other References:
LAND MICHAEL A., BAČIĆ GORAN, ROBERTSON KATHERINE N., BARRY SEÁN T.: "Thermal Stability and Decomposition Pathways in Volatile Molybdenum(VI) Bis-imides", INORGANIC CHEMISTRY, AMERICAN CHEMICAL SOCIETY, EASTON , US, vol. 61, no. 12, 28 March 2022 (2022-03-28), Easton , US , pages 4980 - 4994, XP093130637, ISSN: 0020-1669, DOI: 10.1021/acs.inorgchem.1c03817
Attorney, Agent or Firm:
PLUS INTERNATIONAL IP LAW FIRM (KR)
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