Title:
MULTI-COORDINATE-SYSTEM CALIBRATION AND DEVICE ALIGNMENT METHOD, AND MASS TRANSFER DEVICE
Document Type and Number:
WIPO Patent Application WO/2024/092560
Kind Code:
A1
Abstract:
A multi-coordinate-system calibration and device alignment method, comprising: determining a first mapping relationship between a first image pixel coordinate system of an intermediate load substrate carrier platform and a world coordinate system by means of the intermediate load substrate carrier platform and visual hand-eye calibration (S1); determining a second mapping relationship between a second image pixel coordinate system of a backplane carrier platform and the world coordinate system by means of the backplane carrier platform and visual hand-eye calibration (S2); determining galvanometer starting point coordinates of a galvanometer starting point of a laser in the world coordinate system (S3); acquiring first template calibration coordinates of an intermediate load substrate in the world coordinate system by using the first mapping relationship and the galvanometer starting point coordinates (S4); acquiring second template calibration coordinates of a backplane in the world coordinate system by using the second mapping relationship and the galvanometer starting point coordinates (S5); during a mass transfer process, performing alignment on the intermediate load substrate on the basis of actual coordinates of the intermediate load substrate carrier platform and the first template calibration coordinates (S6); and during the mass transfer process, performing alignment on the backplane on the basis of actual coordinates of the backplane carrier platform and the second template calibration coordinates (S7).
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Inventors:
WANG CHENGFEI (CN)
YAN JUNWEI (CN)
CHEN ZHONGLIN (CN)
ZHOU REN (CN)
AN JINXIN (CN)
REN ZE (CN)
PEI GUANGHUI (CN)
WANG DAJUN (CN)
YAN JUNWEI (CN)
CHEN ZHONGLIN (CN)
ZHOU REN (CN)
AN JINXIN (CN)
REN ZE (CN)
PEI GUANGHUI (CN)
WANG DAJUN (CN)
Application Number:
PCT/CN2022/129297
Publication Date:
May 10, 2024
Filing Date:
November 02, 2022
Export Citation:
Assignee:
BOE TECHNOLOGY GROUP CO LTD (CN)
International Classes:
H01L33/00; H01L21/68
Domestic Patent References:
| WO2021000384A1 | 2021-01-07 |
Foreign References:
| CN113675122A | 2021-11-19 | |||
| US20190334056A1 | 2019-10-31 | |||
| CN113257978A | 2021-08-13 | |||
| CN114420607A | 2022-04-29 | |||
| CN216288360U | 2022-04-12 | |||
| CN114792344A | 2022-07-26 | |||
| US20200194616A1 | 2020-06-18 |
Attorney, Agent or Firm:
BEIJING ZBSD PATENT & TRADEMARK AGENT LTD. (CN)
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