Title:
MINIATURE MICROWAVE CAVITY FOR ATOMIC CLOCK, AND MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2022/148211
Kind Code:
A1
Abstract:
Disclosed in the present invention is a miniature microwave cavity for an atomic clock, comprising an atomic gas chamber and a substrate. A rectangular thin plate-shaped dielectric of the substrate has the bottom surface entirely plated with a metal coating, the middle of the top surface plated with a rectangular metal coating, and the periphery of the top surface plated with a hollow rectangular metal coating; the atomic gas chamber comprises a gas chamber base body; two side walls of the gas chamber base body are plated with spiral copper wires having the same spiral direction, to generate a static magnetic field perpendicular to the optical axis direction; a shielding cover has an open bottom surface to cover the hollow rectangular metal coating. Also disclosed is a manufacturing method for the miniature microwave cavity for an atomic clock. The microwave cavity in the present invention is simple in structure, the atomic gas chamber can be integrated on the silicon substrate by means of micro-electromechanical processing technology, and the volume and power consumption of the microwave cavity are greatly reduced; the polarization direction of the microwave magnetic field in the atomic gas chamber is good in consistency and parallel to the direction of a quantization axis, high-strength atomic frequency-discrimination signals can be easily obtained, and it is beneficial to manufacturing atomic clocks having high stability.
Inventors:
WANG PENGFEI (CN)
WANG CHEN (CN)
ZHAO FENG (CN)
MEI GANGHUA (CN)
WANG CHEN (CN)
ZHAO FENG (CN)
MEI GANGHUA (CN)
Application Number:
PCT/CN2021/137340
Publication Date:
July 14, 2022
Filing Date:
December 13, 2021
Export Citation:
Assignee:
INNOVATION ACADEMY FOR PRECISION MEASUREMENT SCIENCE AND TECH CAS (CN)
International Classes:
G04F5/14; H01P7/06
Foreign References:
| CN112886176A | 2021-06-01 | |||
| CN111610711A | 2020-09-01 | |||
| EP3244269A1 | 2017-11-15 | |||
| CN102323738A | 2012-01-18 | |||
| CN104090481A | 2014-10-08 |
Attorney, Agent or Firm:
WUHAN YUCHEN PATENT FIRM (GENERAL PARTNERSHIP) (CN)
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