MICROMIRROR DEVICE AND OPTICAL SCANNING APPARATUS

WIPO Patent Application WO/2024/062856

A1

A micromirror device (2) according to the present invention comprises a mirror part (20), a pair of first support parts (21), a pair of movable frames (22), a pair of second support parts (23), a driving part, a fixed frame (27), and a pair of connection parts (26B). The first support parts (21) each have a linearly symmetrical shape about a first axis (a1). The second support parts (23) each have a linearly symmetrical shape about a second axis (a2) and each have a second oscillation shaft (23A), which is disposed along the second axis (a2), and a pair of second connecting parts (23B), which are disposed at opposing positions with the second axis (a2) therebetween. One end of each second oscillation shaft (23A) is connected a movable frame (22), and the other end thereof is connected to the second connecting parts (23B). The second connecting parts (23B) each extend from the outer end part of a respective second oscillation shaft (23A) on the second axis (a2) and toward the mirror part, and are each connected to the driving part in a region adjacent to a movable frame (22). The connection parts (26B) each have a linearly symmetrical shape about the second axis (a2) and support the driving part in a manner that enables oscillation about the second axis (a2).

AOSHIMA KEISUKE (JP)

PCT/JP2023/031287

March 28, 2024

August 29, 2023

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FUJIFILM CORP (JP)

G02B26/10; B81B3/00; G02B26/08

WO2022049954A1	2022-03-10
WO2022030146A1	2022-02-10

JP2023039221A	2023-03-20
JP2023039222A	2023-03-20

TAIYO, NAKAJIMA & KATO (JP)

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