Title:
METHOD FOR REGENERATING CRYOPUMP
Document Type and Number:
WIPO Patent Application WO/2024/054066
Kind Code:
A1
Abstract:
Provided is a method for regenerating a cryopump comprising: a freezer which is provided with a first stage part and a second stage part cooled to a lower temperature than the first stage part; a cryopanel which includes a baffle and a heat blocking material cooled by the first stage part and a second stage panel cooled by the second stage part; a cryopump container which surrounds the cryopanel; a first heater which is installed in the first stage part; and a second heater which is installed in the second stage part. The method comprises: a temperature raising step of supplying a purge gas into the cryopump container while operating the freezer, thereby increasing the temperature of the first stage part and the second stage part; a roughing step of exhausting the gas collected in the cryopump container so that the cryopump container reaches a preset pressure; and a cool-down step of lowering the temperature of each of the first stage part and the second stage part to the operating temperature.
Inventors:
KIM YOUNG BAE (KR)
AHN KYUNG JOON (KR)
AHN KYUNG JOON (KR)
Application Number:
PCT/KR2023/013429
Publication Date:
March 14, 2024
Filing Date:
September 07, 2023
Export Citation:
Assignee:
CRYO H&I INC (KR)
International Classes:
F04B37/08; F04B37/14; F04B49/06; F04B53/08
Foreign References:
| KR101674088B1 | 2016-11-08 | |||
| JP2002070737A | 2002-03-08 | |||
| KR101104171B1 | 2012-01-12 | |||
| KR101527070B1 | 2015-06-09 | |||
| JP4927642B2 | 2012-05-09 | |||
| KR102536330B1 | 2023-05-26 |
Attorney, Agent or Firm:
MAPS INTELLECTUAL PROPERTY LAW FIRM (KR)
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