Title:
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE USING SEMICONDUCTOR GROWTH TEMPLATE
Document Type and Number:
WIPO Patent Application WO/2024/096487
Kind Code:
A1
Abstract:
The present invention relates to a method for manufacturing a semiconductor device using a semiconductor growth template, and to a method for manufacturing a semiconductor light-emitting device or a power semiconductor device by using a semiconductor growth template including an ultra-thin type sapphire seed layer.
Inventors:
SONG JUNEO (KR)
YUN HYEONG SEON (KR)
HAN YOUNG HUN (KR)
MOON JI HYUNG (KR)
YUN HYEONG SEON (KR)
HAN YOUNG HUN (KR)
MOON JI HYUNG (KR)
Application Number:
PCT/KR2023/017027
Publication Date:
May 10, 2024
Filing Date:
October 30, 2023
Export Citation:
Assignee:
WAVELORD CO LTD (KR)
International Classes:
H01L29/66; H01L21/02; H01L29/20; H01L33/00; H01L33/22
Foreign References:
JP2013125971A | 2013-06-24 | |||
KR20060061305A | 2006-06-07 | |||
KR20080096997A | 2008-11-04 | |||
KR20210123064A | 2021-10-13 | |||
US10312358B2 | 2019-06-04 |
Attorney, Agent or Firm:
PARK, Kil Hwan et al. (KR)
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