Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE USING SEMICONDUCTOR GROWTH TEMPLATE
Document Type and Number:
WIPO Patent Application WO/2024/096487
Kind Code:
A1
Abstract:
The present invention relates to a method for manufacturing a semiconductor device using a semiconductor growth template, and to a method for manufacturing a semiconductor light-emitting device or a power semiconductor device by using a semiconductor growth template including an ultra-thin type sapphire seed layer.

Inventors:
SONG JUNEO (KR)
YUN HYEONG SEON (KR)
HAN YOUNG HUN (KR)
MOON JI HYUNG (KR)
Application Number:
PCT/KR2023/017027
Publication Date:
May 10, 2024
Filing Date:
October 30, 2023
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
WAVELORD CO LTD (KR)
International Classes:
H01L29/66; H01L21/02; H01L29/20; H01L33/00; H01L33/22
Foreign References:
JP2013125971A2013-06-24
KR20060061305A2006-06-07
KR20080096997A2008-11-04
KR20210123064A2021-10-13
US10312358B22019-06-04
Attorney, Agent or Firm:
PARK, Kil Hwan et al. (KR)
Download PDF: