Title:
METHOD FOR MANUFACTURING MEMS VIBRATION ELEMENT, AND MEMS VIBRATION ELEMENT
Document Type and Number:
WIPO Patent Application WO/2019/031565
Kind Code:
A1
Abstract:
Provided is a method for manufacturing a MEMS vibration element having a fixed electrode, a movable electrode, and an elastic support portion that elastically supports the movable electrode with respect to the fixed electrode, the method comprising: a step for forming the fixed electrode and the movable electrode by etching a base with a first thickness; and a step for forming the elastic support portion with a second thickness that is thinner than the first thickness, by etching the base.
Inventors:
HASHIGUCHI GEN (JP)
KOGA HIDEAKI (JP)
KOGA HIDEAKI (JP)
Application Number:
PCT/JP2018/029842
Publication Date:
February 14, 2019
Filing Date:
August 08, 2018
Export Citation:
Assignee:
UNIV SHIZUOKA NAT UNIV CORP (JP)
SAGINOMIYA SEISAKUSHO INC (JP)
SAGINOMIYA SEISAKUSHO INC (JP)
International Classes:
B81C1/00; B81B3/00; H01G5/013; H01G7/02; H02N2/18; H02N11/00
Domestic Patent References:
| WO2017057317A1 | 2017-04-06 | |||
| WO2014034602A1 | 2014-03-06 |
Foreign References:
| JP2006005731A | 2006-01-05 |
Attorney, Agent or Firm:
NAGAI, Fuyuki et al. (JP)
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