Title:
METHOD FOR MANUFACTURING MEMBER HAVING CONCAVE STRUCTURE, AND MEMBER HAVING CONCAVE STRUCTURE
Document Type and Number:
WIPO Patent Application WO/2024/095769
Kind Code:
A1
Abstract:
Provided is a method for manufacturing a member having a concave structure, the method comprising: (1) a step for installing a catalyst material on a portion of a first surface of an object to be treated, wherein the first surface is composed of an element in which a fluoride has a boiling point of at most 550 °C, and the catalyst material includes an organic compound having a polar functional group; (2) a step for irradiating the catalyst material with irradiation light containing deep ultraviolet having a wavelength of at most 380 nm; and (3) a step for exposing the object to be treated to a fluorine-containing gas at a temperature of at least 80 °C. After the step (3), a concave structure is formed under the catalyst material on the first surface.
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Inventors:
SANO KOHEI (JP)
ONO YOSHITAKA (JP)
HAYASHI YASUO (JP)
ONO YOSHITAKA (JP)
HAYASHI YASUO (JP)
Application Number:
PCT/JP2023/037673
Publication Date:
May 10, 2024
Filing Date:
October 18, 2023
Export Citation:
Assignee:
AGC INC (JP)
International Classes:
H01L21/302; C23F1/12; H01L21/3065
Foreign References:
| JPS5587436A | 1980-07-02 | |||
| JPS531198A | 1978-01-07 | |||
| JP2018082114A | 2018-05-24 | |||
| JP2017117963A | 2017-06-29 | |||
| JP2012104858A | 2012-05-31 | |||
| JP2021190679A | 2021-12-13 |
Attorney, Agent or Firm:
ITOH, Tadashige et al. (JP)
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