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Title:
MEMS SWITCH WITH MULTIPLE DEFORMATIONS AND SWITCH COMPRISING ONE OR MORE MEMS SWITCHES
Document Type and Number:
WIPO Patent Application WO/2024/033770
Kind Code:
A1
Abstract:
The invention relates to a microelectromechanical systems (MEMS) switch (201'), comprising a substrate (202'), at least one signal input line (203'), at least one signal output line (204'), at least one contact zone formed on a contact zone base (206'a, 206'b) integral with the substrate, and a contact membrane (205') held by at least one anchoring base (206'c) integral with the substrate, wherein, for each contact zone, the contact membrane (205') constitutes a first entity, the contact base (206'a, 206'b) constitutes a second entity and the at least one anchoring base (206'c) constitutes a third entity, and at least two entities from among the first entity, the second entity and the third entity are deformable, each by an independent actuating means, in order to move the contact membrane towards or away from the contact zone.

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Inventors:
STEFANINI ROMAIN (FR)
BLONDY PIERRE (FR)
Application Number:
PCT/IB2023/057909
Publication Date:
February 15, 2024
Filing Date:
August 04, 2023
Export Citation:
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Assignee:
AIRMEMS (FR)
UNIV LIMOGES (FR)
CENTRE NAT RECH SCIENT (FR)
International Classes:
H01H59/00
Domestic Patent References:
WO2006046192A12006-05-04
WO1999063562A11999-12-09
WO2007078589A12007-07-12
Foreign References:
EP2200063A22010-06-23
US20060131150A12006-06-22
FR3090615B12020-12-11
EP1535296A12005-06-01
EP1535297A12005-06-01
EP1840924A22007-10-03
EP1850360A12007-10-31
EP3378087A12018-09-26
US20200102213A12020-04-02
US6701779B22004-03-09
EP3465724A12019-04-10
Other References:
LOVELESS, A.M.MENG, G.YING, Q. ET AL., SCI REP, vol. 9, 2019, pages 5669
ALGAMILI, A.S.KHIR, M.H.M.DENNIS, J.O. ET AL.: "A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices (Etude des mécanismes d'actionnement et de détection dans les dispositifs de détection à base de MEMS", NANOSCALE RES LETT, vol. 16, 2021, pages 16
Attorney, Agent or Firm:
CABINET CHAILLOT (FR)
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