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Title:
MEMS MICROPHONE
Document Type and Number:
WIPO Patent Application WO/2023/206721
Kind Code:
A1
Abstract:
Provided in the present invention is an MEMS microphone. The MEMS microphone comprises a base having a back cavity and a capacitive system arranged on the base; the capacitive system comprises a back plate and a diaphragm arranged opposite to the back plate, the diaphragm being located on the side of the back plate close to the base, and the diaphragm comprising a vibration part and a fixed part surrounding the vibration part and fixed to the base. The MEMS microphone is further provided with a supporting member located between the diaphragm and the back plate, the vibration part of the diaphragm being fixedly connected to the back plate by means of the supporting member. A blocking part is arranged on the side of the back plate facing the diaphragm, the projection of the blocking part in the vibration direction of the diaphragm being located at the vibration part of the diaphragm. Compared with the related art, the MEMS microphone provided by the present invention can improve the signal-to-noise ratio thereof.

Inventors:
ZHAO ZHUANZHUAN (CN)
SHI ZHENGYU (CN)
WANG KAIJIE (CN)
WANG LINLIN (CN)
ZHANG RUI (CN)
Application Number:
PCT/CN2022/097266
Publication Date:
November 02, 2023
Filing Date:
June 07, 2022
Export Citation:
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Assignee:
AAC ACOUSTIC TECH SHENZHEN CO LTD (CN)
International Classes:
H04R19/00
Foreign References:
CN215818620U2022-02-11
CN113691916A2021-11-23
CN211152208U2020-07-31
CN110574397A2019-12-13
CN215529301U2022-01-14
US20150078589A12015-03-19
Attorney, Agent or Firm:
SHENZHEN SANYONG INTELLECTUAL PROPERTY AGENCY (GENERAL PARTNERSHIP) (CN)
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