Title:
MEMS ELEMENT AND PIEZOELECTRIC ACOUSTIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/218908
Kind Code:
A1
Abstract:
This MEMS element (1) is equipped with: a piezoelectric element (100) including a piezoelectric film (40) which includes a ferroelectric substance and vibrates as a result of applying a voltage thereto; and a diode unit (200) which is electrically connected in parallel to the piezoelectric element (100) and includes one or more diodes (200A, 210, 220).
Inventors:
MATSUBARA HIROSHI (JP)
IKEUCHI SHINSUKE (JP)
NIWA RYOSUKE (JP)
SAITOU GOU (JP)
IKEUCHI SHINSUKE (JP)
NIWA RYOSUKE (JP)
SAITOU GOU (JP)
Application Number:
PCT/JP2023/015927
Publication Date:
November 16, 2023
Filing Date:
April 21, 2023
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
B81B3/00; H04R17/00; H10N30/045; H10N30/20; H10N30/30; H10N30/80; H10N30/853
Foreign References:
| JPH04343280A | 1992-11-30 | |||
| JP2004095843A | 2004-03-25 | |||
| JP2021052305A | 2021-04-01 | |||
| JP2020195116A | 2020-12-03 | |||
| JP2018080915A | 2018-05-24 | |||
| JPS5961555U | 1984-04-23 | |||
| JP2005286658A | 2005-10-13 |
Attorney, Agent or Firm:
FUKAMI PATENT OFFICE, P.C. (JP)
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