Title:
MEMS ELEMENT AND PIEZOELECTRIC ACOUSTIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/218690
Kind Code:
A1
Abstract:
A MEMS element (1) comprises: a piezoelectric element (100) that includes a piezoelectric film (40) that includes a ferroelectric and vibrates when voltage is applied thereto; and a diode part (200) that is electrically connected to the piezoelectric element (100) in parallel and includes at least one diode (200A, 210, 220).
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Inventors:
MATSUBARA HIROSHI (JP)
IKEUCHI SHINSUKE (JP)
NIWA RYOSUKE (JP)
IKEUCHI SHINSUKE (JP)
NIWA RYOSUKE (JP)
Application Number:
PCT/JP2022/046656
Publication Date:
November 16, 2023
Filing Date:
December 19, 2022
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
B81B3/00; H04R17/00; H10N30/045; H10N30/20; H10N30/30; H10N30/80; H10N30/853
Foreign References:
| JPS5961555U | 1984-04-23 | |||
| JPH04343280A | 1992-11-30 | |||
| JP2021052305A | 2021-04-01 | |||
| JP2018080915A | 2018-05-24 |
Attorney, Agent or Firm:
FUKAMI PATENT OFFICE, P.C. (JP)
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