Title:
MEMS DEVICE AND MANUFACTURING METHOD THEREFOR, AND ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2024/087079
Kind Code:
A1
Abstract:
The present disclosure belongs to the technical field of micro-electro-mechanical systems (MEMSs). Provided are an MEMS device and a manufacturing method therefor, and an electronic device. The MEMS device in the present disclosure comprises: a dielectric substrate; a drive electrode, a first reference electrode and a second reference electrode, which are arranged on the dielectric substrate, wherein the first reference electrode and the second reference electrode are respectively positioned on two sides of the drive electrode in an extension direction; a first dielectric layer, which covers the side of the drive electrode facing away from the dielectric substrate; and a film bridge, which is arranged on the side of the first dielectric layer facing away from the dielectric substrate, wherein there is a first gap between the first reference electrode and the drive electrode; there is a second gap between the second reference electrode and the drive electrode; the thicknesses of the parts of the first dielectric layer in the first gap and the second gap are greater than the thickness of the drive electrode; and/or a second dielectric layer is arranged on the side of a bridge face of the film bridge close to the dielectric substrate, and the orthographic projection of the second dielectric layer on the dielectric substrate at least covers the orthographic projection of the drive electrode on the dielectric substrate.
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Inventors:
LIU JIANXING (CN)
GUO JINGWEN (CN)
WU QIANHONG (CN)
LI CHUNXIN (CN)
CAO ZIBO (CN)
ZHAO JIANYUN (CN)
QU FENG (CN)
LI BIQI (CN)
GUO JINGWEN (CN)
WU QIANHONG (CN)
LI CHUNXIN (CN)
CAO ZIBO (CN)
ZHAO JIANYUN (CN)
QU FENG (CN)
LI BIQI (CN)
Application Number:
PCT/CN2022/127808
Publication Date:
May 02, 2024
Filing Date:
October 27, 2022
Export Citation:
Assignee:
BOE TECHNOLOGY GROUP CO LTD (CN)
International Classes:
H01P1/18; H01H49/00; H01H59/00
Foreign References:
| CN114824698A | 2022-07-29 | |||
| CN2729890Y | 2005-09-28 | |||
| CN2658933Y | 2004-11-24 | |||
| CN114551166A | 2022-05-27 |
Attorney, Agent or Firm:
TEE&HOWE INTELLECTUAL PROPERTY ATTORNEYS (CN)
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