MEMS CAPACITIVE SWITCH

WIPO Patent Application WO/2021/243745

A1

Disclosed is a MEMS capacitive switch, comprising a substrate (1), and a switch beam (4) and an effective electrode (3) which are arranged above the substrate (1). The switch beam (4) comprises a cross beam portion (42) arranged in parallel with the substrate (1) and an extension portion (41) perpendicular to the cross beam portion (42). The effective electrode (3) is arranged between the cross beam portion (42) and the substrate (1). At least when the MEMS capacitive switch is in an off state, a top wall (31) of the effective electrode (3) is opposite the cross beam portion (42) of the switch beam (4), and a side wall (32) of the effective electrode (3) is opposite the extension portion (41) of the switch beam (4), so as to form a capacitor. The switch has a simple overall structure, and is a MEMS capacitive switch capable of achieving high on/off state capacitance ratios at the same time. Compared with a traditional switch only having a variable-pitch plate capacitor, charge injection is reduced, such that the service life of the switch is prolonged, the reliability of the switch is improved, and the switch is readily achieved in a process and is easy to manufacture.

KONG LINGCHENG (CN)
ZHU YANQING (CN)
WANG CHAO (CN)
LI YANG (CN)

PCT/CN2020/095628

December 09, 2021

June 11, 2020

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AAC ACOUSTIC TECH SHENZHEN CO LTD (CN)

H01H59/00

CN110047662A	2019-07-23
CN107582081A	2018-01-16
CN105742124A	2016-07-06
CN104037027A	2014-09-10
CN203910687U	2014-10-29
CN102324344A	2012-01-18
CN102269598A	2011-12-07
US20060168788A1	2006-08-03

HENSEN INTELLECTUAL PROPERTY FIRM (CN)

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