MEMS CAPACITIVE SWITCH AND ELECTRONIC DEVICE

WIPO Patent Application WO/2021/237770

A1

The present utility model provides an MEMS capacitive switch and an electronic device. The MEMS capacitive switch comprises a substrate, a dielectric layer provided on the surface of the substrate, a metal beam erected above the dielectric layer by means of an anchor point, an active electrode provided on the surface of the dielectric layer and opposite to the metal beam, a driving electrode provided on peripheral side of the active electrode, and a dielectric cylinder provided on the surface of the driving electrode and located between the driving electrode and the metal beam. The dielectric cylinder is provided on the peripheral side of the active electrode, and the cross section of the dielectric cylinder cut in a direction perpendicular to the dielectric layer is of a specific shape, so that the stiffness of the dielectric cylinder in the vertical direction is less than 1/10 of the stiffness thereof in the horizontal direction. The MEMS capacitive switch provided by the present utility model can obtain a high off-state capacitance without requiring repeated adjustment, the processing technology is simple, and it is easy to control.

JP2024512349	Sealed MEMS switching element, device, and manufacturing method
JP2005166622	MICRO MACHINE SWITCH
WO/2021/115991	A SWITCH DEVICE FACILITATING FREQUENCY SHIFT OF A RESONATOR IN A QUANTUM DEVICE

KONG LINGCHENG (CN)
ZHU YANQING (CN)
WANG CHAO (CN)
LI YANG (CN)

PCT/CN2020/094163

December 02, 2021

June 03, 2020

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AAC ACOUSTIC TECH SHENZHEN CO LTD (CN)

H01H59/00

CN101763987A	2010-06-30
US7501920B2	2009-03-10
CN1953323A	2007-04-25
CN101651065A	2010-02-17
US20040119126A1	2004-06-24

HENSEN INTELLECTUAL PROPERTY FIRM (CN)

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