Title:
MEASUREMENT DEVICE AND MEASUREMENT METHOD
Document Type and Number:
WIPO Patent Application WO/2023/080217
Kind Code:
A1
Abstract:
This measurement device 20 comprises a control unit 13 that outputs electromagnetic waves from an electromagnetic wave output source 7 toward a sample 30 having a first layer 31 and a second layer 32 adjacent to each other and to which vibration is applied at a predetermined vibration frequency, receives reflected waves of the electromagnetic waves from a part 35 to be measured in the interface between the first layer 31 and the second layer 32, calculates the frequency or amplitude of vibration of the part 35 to be measured on the basis of the reflected waves, and measures the adhesive strength of the part 35 to be measured on the basis of the frequency or the amplitude of the vibration of the part 35 to be measured calculated on the basis of the reflected waves.
Inventors:
OKADA SYUHEI (JP)
Application Number:
PCT/JP2022/041248
Publication Date:
May 11, 2023
Filing Date:
November 04, 2022
Export Citation:
Assignee:
YOKOGAWA ELECTRIC CORP (JP)
International Classes:
G01N21/552; G01N19/04; G01N21/88
Foreign References:
| JP2020176848A | 2020-10-29 | |||
| JP2013507640A | 2013-03-04 | |||
| US20050023434A1 | 2005-02-03 | |||
| JP2021181510A | 2021-11-25 |
Attorney, Agent or Firm:
SUGIMURA Kenji (JP)
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