Title:
MANUFACTURING METHOD FOR MASTER DISK, MANUFACTURING METHOD FOR TRANSFERRED OBJECT, MANUFACTURING METHOD FOR REPLICA MASTER DISK, AND MANUFACTURING DEVICE FOR MASTER DISK
Document Type and Number:
WIPO Patent Application WO/2023/190516
Kind Code:
A1
Abstract:
[Problem] To form with high precision a recess-and-protrusion structured pattern having an arbitrarily defined three-dimensional shape on the outer peripheral surface of a master disk. [Solution] This manufacturing method for a master disk includes: a step for forming a resist layer on the outer peripheral surface of a substrate; a step for dividing an input image, which is obtained by depicting an object having a three-dimensional shape in two dimensions, into a plurality of small areas; a step for determining stepwise the intensity of a laser beam to be radiated onto each of the small areas on the basis of the color shade of a partial image of the object in each of the small areas in which the object is included and generating an exposure control signal corresponding to the object on the basis of the result of the determination; a step for irradiating the resist layer with the laser beam on the basis of the exposure control signal and thereby forming a resist pattern for which the depth changes in accordance with the color shades of the partial images; and a step for using the resist layer as a mask to form a recess-and-protrusion pattern corresponding to the three-dimensional shape of the object on the outer peripheral surface of the substrate.
Inventors:
KIKUCHI MASANAO (JP)
Application Number:
PCT/JP2023/012514
Publication Date:
October 05, 2023
Filing Date:
March 28, 2023
Export Citation:
Assignee:
DEXERIALS CORP (JP)
International Classes:
G03F7/20; B29C59/04; G03F7/24
Foreign References:
| JP2021154626A | 2021-10-07 | |||
| JP2016028867A | 2016-03-03 | |||
| JP2021527238A | 2021-10-11 | |||
| KR20100058998A | 2010-06-04 |
Attorney, Agent or Firm:
AOMI PATENT (JP)
Download PDF: