Title:
MANUFACTURING METHOD FOR MAGNETIC MEMORY
Document Type and Number:
WIPO Patent Application WO/2023/193738
Kind Code:
A1
Abstract:
The embodiments of the present application disclose a manufacturing method for a magnetic memory, the method comprising: etching laminated layers of a magnetic tunnel junction until a metal layer is reached; oxidizing or nitriding the metal layer and side walls of a free layer and a pinned layer so as to obtain a protective layer; and etching side walls of the protective layer and an oxide layer to remove pollutants on the side wall of the oxide layer. When pollutants on the side wall of the oxide layer are removed by means of etching, the protective layer is used for protecting the side walls of the free layer and the pinned layer, such that etching residues of the free layer and the pinned layer do not attach to the oxide layer, and pollutants on the side wall of the oxide layer can also be removed by means of etching; in addition, since the metal layer is covered by the protective layer, the protective layer is etched first and the etching amount of the metal layer is relatively low, and thus the situation whereby the metal layer is severely damaged or even etched through when etching to remove pollutants on the side wall of the oxide layer is avoided; therefore, pollutants on the side wall of the oxide layer can be removed by means of etching, thereby improving the performance and the yield of a device, and the metal layer can also be prevented from being excessively etched, thereby further improving the yield of the device.
Inventors:
ZHENG ZHIYUAN (CN)
PENG TAIYAN (CN)
YANG YUXIN (CN)
XU KAIDONG (CN)
PENG TAIYAN (CN)
YANG YUXIN (CN)
XU KAIDONG (CN)
Application Number:
PCT/CN2023/086439
Publication Date:
October 12, 2023
Filing Date:
April 06, 2023
Export Citation:
Assignee:
JIANGSU LEUVEN INSTR CO LTD (CN)
International Classes:
H10N50/01; G11C11/16; H10B61/00; H10N50/10
Foreign References:
| CN115768129A | 2023-03-07 | |||
| US20170069834A1 | 2017-03-09 | |||
| CN110945673A | 2020-03-31 | |||
| CN113707804A | 2021-11-26 | |||
| JP2021190656A | 2021-12-13 |
Attorney, Agent or Firm:
UNITALEN ATTORNEYS AT LAW CO., LTD. (CN)
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