MACHINE LEARNING DEVICE, SUBSTRATE PROCESSING DEVICE, TRAINED MODEL, MACHINE LEARNING METHOD, AND MACHINE LEARNING PROGRAM

WIPO Patent Application WO/2021/054236

A1

The present invention comprises: a state information acquisition unit that acquires state information including the position of a substrate within the device and the time spent thereby in various units; an action selection part that has a prediction model for predicting action performance values for whether to retrieve a new substrate from a cassette in a given state and for which processing unit to convey the substrate to, and that selects one action on the basis of the prediction model by using the acquired state information as input; an instructions signal transmitting part that transmits an instructions signal to perform the selected action; an operation results acquisition part that acquires operation results including processed substrate count and wait time; and a prediction model updating part that calculates a reward on the basis of the acquired operation results so that the reward increases as the number of processed substrates increases and the wait time decreases, and updates the prediction model on the basis of the reward.

NAKAMURA AKIRA (JP)
NAKAMURA TAKAMASA (JP)
TORIKOSHI TSUNEO (JP)
OTAKI HIROFUMI (JP)

PCT/JP2020/034234

March 25, 2021

September 10, 2020

Click for automatic bibliography generation  

EBARA CORP (JP)

B24B51/00; B24B37/005; G06N20/00; H01L21/304

WO2008133286A1

2008-11-06

JP2019040984A	2019-03-14
JP2015199181A	2015-11-12
JP2010027701A	2010-02-04
JP2012074574A	2012-04-12
JP2009004442A	2009-01-08
JP2005109437A	2005-04-21
JP2010087135A	2010-04-15
JP2018186203A	2018-11-22
JP2008091698A	2008-04-17

OHNO Seiji et al. (JP)

View/Download PDF      PDF Help

Previous Patent: IMAGE CAPTURING DEVICE, AND IMAGE PROCESSING METHOD

Next Patent: BIOLOGICAL COMPONENT CASSETTE, BIOLOGICAL COMPONENT KIT, AND BIOLOGICAL COMPONENT TREATMENT SYSTEM