Title:
LIQUID TENSION CONTROL METHOD CAPABLE OF IMPROVING WAFER DRYING EFFICIENCY
Document Type and Number:
WIPO Patent Application WO/2024/051335
Kind Code:
A1
Abstract:
The present invention relates to a liquid tension control method capable of improving wafer drying efficiency. The method comprises: Step 1, putting a wafer cassette connected to a swinging mechanism in a drying tank body, loading wafers in the wafer cassette, combining the drying tank body and an upper cover dome and keeping same airtight, and evacuating trace gas; Step 2, injecting normal-temperature nitrogen from the upper cover dome, and injecting ultrapure water into the drying tank body to perform surface wetting of the wafers; Step 3, completing the surface wetting of the wafers, and then performing the following operations: S1, injecting a mixture of isopropanol and heated nitrogen into the drying tank body by using a special integrated module, and discharging the ultrapure water from the bottom of the drying tank body at a controlled speed; and S2, in the ultrapure water discharging process, operating the swinging mechanism to carry the wafers to form planetary swinging, such that water molecules on the wafers are rapidly separated; and Step 4, repeating to complete wafer drying. According to the present invention, residual water on the surfaces of the wafers is rapidly taken away by means of the planetary arc swing drying technology, and rapid drying of the wafers is achieved by effectively controlling the liquid tension.
Inventors:
JIANG YUAN (CN)
LIAO SHIBAO (CN)
DENG XINFU (CN)
LI PANPAN (CN)
LU ZHENGKAI (CN)
LIAO SHIBAO (CN)
DENG XINFU (CN)
LI PANPAN (CN)
LU ZHENGKAI (CN)
Application Number:
PCT/CN2023/106066
Publication Date:
March 14, 2024
Filing Date:
July 06, 2023
Export Citation:
Assignee:
PNC PROCESS SYSTEMS CO LTD (CN)
ULTRON SEMICONDUCTOR SHANGHAI CO LTD (CN)
ULTRON SEMICONDUCTOR SHANGHAI CO LTD (CN)
International Classes:
H01L21/67; F26B11/18; F26B21/14
Foreign References:
| CN116313882A | 2023-06-23 | |||
| CN114485074A | 2022-05-13 | |||
| CN1368755A | 2002-09-11 | |||
| CN114914176A | 2022-08-16 | |||
| CN113851398A | 2021-12-28 | |||
| CN108831849A | 2018-11-16 | |||
| CN113539900A | 2021-10-22 | |||
| US20160265846A1 | 2016-09-15 |
Attorney, Agent or Firm:
SHANGHAI YUANTONG LAW FIRM (CN)
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