Title:
LIQUID MATERIAL VAPORIZER AND LIQUID MATERIAL VAPORIZATION METHOD
Document Type and Number:
WIPO Patent Application WO/2024/080180
Kind Code:
A1
Abstract:
This liquid material vaporizer comprises: a gas-liquid mixing section that mixes a liquid material and a carrier gas to generate a gas-liquid mixture; a carrier gas supply channel that supplies the carrier gas to the gas-liquid mixing section; a channel section through which the gas-liquid mixture generated in the gas-liquid mixing section flows; a vaporizer that heats and vaporizes the liquid material contained in the gas-liquid mixture that flows through the channel section; and a cooling section that cools the channel section. The cooling section is connected to the carrier gas supply channel.
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Inventors:
NISHIWAKI KEISUKE (JP)
Application Number:
PCT/JP2023/035869
Publication Date:
April 18, 2024
Filing Date:
October 02, 2023
Export Citation:
Assignee:
HORIBA STEC CO LTD (JP)
International Classes:
B01J7/00; B05B7/04; C23C16/448; H01L21/31
Domestic Patent References:
| WO2021033414A1 | 2021-02-25 |
Foreign References:
| JP2012177193A | 2012-09-13 | |||
| JPH06201544A | 1994-07-19 | |||
| JP5004890B2 | 2012-08-22 | |||
| JP2004091809A | 2004-03-25 | |||
| JPH11236673A | 1999-08-31 |
Attorney, Agent or Firm:
SANO PATENT OFFICE (JP)
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