Title:
LIQUID DELIVERY PUMP
Document Type and Number:
WIPO Patent Application WO/2023/127327
Kind Code:
A1
Abstract:
The present invention provides a liquid delivery pump which is capable of delivering a liquid at a high accuracy of flow while taking into consideration solvent expansion, leakage dependent on solvent pressure, and leakage dependent on solvent flow. This liquid delivery pump (1) is equipped with: a first plunger pump (101) provided with a first plunger (21); a second plunger pump (102) provided with a second plunger (22) and connected to the first plunger pump (101); a pressure sensor (110) for measuring the liquid delivery pressure (P2) from the second plunger pump (102); and a control unit (10) for controlling the driving of the first plunger (21) and the second plunger (22). A control unit (10) obtains the moving velocity (v1) of the first plunger (21) and the moving velocity (v2) of the second plunger (22) by using a parameter (C1, C0) dependent on liquid delivery pressure (P2), the liquid delivery pressure (P2), and the liquid target flow. The parameter (C1, C0) is a parameter of a formula which expresses the relationship between the liquid delivery pressure (P2) and the liquid flow (Q0).
Inventors:
TSUKADA NOBUHIRO (JP)
KANAI DAISUKE (JP)
IWASA SHO (JP)
HARADA YUSHI (JP)
YOTA YUSUKE (JP)
KANAI DAISUKE (JP)
IWASA SHO (JP)
HARADA YUSHI (JP)
YOTA YUSUKE (JP)
Application Number:
PCT/JP2022/042160
Publication Date:
July 06, 2023
Filing Date:
November 14, 2022
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
G01N30/32; F04B23/06
Domestic Patent References:
| WO2019082243A1 | 2019-05-02 | |||
| WO2019220563A1 | 2019-11-21 | |||
| WO2021005728A1 | 2021-01-14 | |||
| WO2021192929A1 | 2021-09-30 |
Foreign References:
| JP2009013957A | 2009-01-22 | |||
| EP2244091B1 | 2015-09-30 |
Attorney, Agent or Firm:
POLAIRE I.P.C. (JP)
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