Title:
LIGHT-SOURCE DEVICE, DISCHARGE LAMP AND MANUFACTURING METHOD THEREFOR, AND EXPOSURE DEVICE
Document Type and Number:
WIPO Patent Application WO/2015/147327
Kind Code:
A1
Abstract:
A light-source device for making a discharge lamp emit light, the discharge lamp having a glass tube in which an anode and a cathode are provided and a base part provided, for a light-emitting part of the discharge lamp, to each of the anode side and cathode side, wherein the light source device is provided with: a storage part for storing the discharge lamp; a support member for removably supporting the base parts of the discharge lamp; a clamp mechanism for removably coupling power cables to the base parts of the discharge lamp that are supported by the support member; and a lamp conveyance system for conveying the discharge lamp, by holding the base parts, between the storage part and the support member while the support of the base parts by the support member and the coupling of the power cables to the base parts by the clamp mechanism are released. The discharge lamp can be efficiently replaced.
Inventors:
AOKI YASUO (JP)
KIKUCHI TAKAYUKI (JP)
SHIRASU HIROSHI (JP)
KIKUCHI TAKAYUKI (JP)
SHIRASU HIROSHI (JP)
Application Number:
PCT/JP2015/060026
Publication Date:
October 01, 2015
Filing Date:
March 30, 2015
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
G03F7/20; F21S2/00; F21V19/00; H01J5/50; H01J61/52; F21Y101/00
Foreign References:
| JP2013219045A | 2013-10-24 | |||
| JP2011206731A | 2011-10-20 | |||
| JP2011177625A | 2011-09-15 | |||
| JP2010199091A | 2010-09-09 | |||
| JP2008262910A | 2008-10-30 | |||
| JP2004079254A | 2004-03-11 | |||
| JP2000133005A | 2000-05-12 |
Attorney, Agent or Firm:
OMORI SATOSHI (JP)
Omori 聡 (JP)
Omori 聡 (JP)
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