LIFTING CONTROL APPARATUSES AND CLEANERS INCLUDING THE SAME

WIPO Patent Application WO/2023/241734

A1

A lifting control apparatus may include: a base for holding a basket containing silicon wafers; brackets provided on an outside of both ends of the base; and a driver for driving the brackets to move up and down. The driver is provided with a lead screw. The lead screw is connected with the bracket on a same side. The lead screw on one side is driven to rotate the lead screw on another side synchronously, and the lead screws on both sides are driven to move the brackets on both sides and the base between the brackets up and down together. Or the lead screws on both sides are driven to rotate synchronously, so that the lead screws on both sides drive the base between the brackets through the correspondingly brackets to move up and down together.

JPH077067	APPARATUS AND METHOD FOR RESIST PROCESSING
JPWO2006117840	Work delivery position teaching device and teaching method to robot
JP2588731	[Title of Invention] Robotic Wafer Transfer Device

JIN LIHUI (CN)
YANG HUA (CN)
REN ZHIGAO (CN)
ZHAO XIAOGUANG (CN)
GUO HAO (CN)
AI CHUANLING (CN)
WANG DAWEI (CN)
WU ZHIJUN (CN)
CEN HONGXIA (CN)
WEI CHEN (CN)

PCT/CN2023/110441

December 21, 2023

July 31, 2023

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TCL ZHONGHUAN RENEWABLE ENERGY TECH CO LTD (CN)

H01L21/677; B08B13/00

CN217847907U	2022-11-18
CN216174798U	2022-04-05
CN107999458A	2018-05-08
CN101972751A	2011-02-16
CN107681023A	2018-02-09

PURPLEVINE INTELLECTUAL PROPERTY (SHENZHEN) CO., LTD. (CN)

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