Title:
JOSEPHSON JUNCTION ELEMENT, QUANTUM DEVICE, AND PRODUCTION METHOD FOR JOSEPHSON JUNCTION ELEMENT
Document Type and Number:
WIPO Patent Application WO/2023/199419
Kind Code:
A1
Abstract:
This Josephson junction element has a first superconducting film, a first insulating film provided above the first superconducting film, and a second superconducting film provided above the first insulating film, wherein: a surface layer portion of the first insulating film has a first region, and a second region at the periphery of the first region; the electrical insulation of the first region is higher than the electrical insulation of the second region; and, in a plan view, the second superconducting film is on the inside of the boundary of the first region and the second region.
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Inventors:
NAKAMURA MAKOTO (JP)
Application Number:
PCT/JP2022/017665
Publication Date:
October 19, 2023
Filing Date:
April 13, 2022
Export Citation:
Assignee:
FUJITSU LTD (JP)
International Classes:
H01L39/22; H01L39/24
Domestic Patent References:
| WO2013051362A1 | 2013-04-11 |
Foreign References:
| US20150236235A1 | 2015-08-20 | |||
| JPS6396973A | 1988-04-27 | |||
| JP2009064880A | 2009-03-26 | |||
| JP2003218413A | 2003-07-31 | |||
| JPH11507436A | 1999-06-29 | |||
| JPH04188683A | 1992-07-07 |
Attorney, Agent or Firm:
ITOH, Tadashige et al. (JP)
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