Title:
INSPECTION DEVICE AND INSPECTION METHOD USING SAME
Document Type and Number:
WIPO Patent Application WO/2023/106756
Kind Code:
A1
Abstract:
Disclosed in an embodiment is an inspection device comprising: a stage having a plurality of micro light-emitting elements arranged thereon; an electron beam irradiation unit for irradiating the plurality of micro light-emitting elements with an electron beam; and a chamber for accommodating the stage and the electron beam irradiation unit therein, and forming a vacuum.
Inventors:
BANG KYU YONG (KR)
Application Number:
PCT/KR2022/019592
Publication Date:
June 15, 2023
Filing Date:
December 05, 2022
Export Citation:
Assignee:
TOP ENG CO LTD (KR)
International Classes:
G01R31/307; G01R31/26; G01R31/28; H01J29/48
Foreign References:
| KR100593317B1 | 2006-06-26 | |||
| KR102170679B1 | 2020-10-27 | |||
| JP4729626B2 | 2011-07-20 | |||
| US20190004105A1 | 2019-01-03 | |||
| KR101831368B1 | 2018-02-23 |
Attorney, Agent or Firm:
DANA PATENT LAW FIRM (KR)
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