Title:
INSPECTION DEVICE AND 3D TOMOGRAPHIC IMAGE FORMING DEVICE
Document Type and Number:
WIPO Patent Application WO/2024/084823
Kind Code:
A1
Abstract:
According to the present invention, a coherent light source is used as a light source 101, the light emitted from the light source 101 is split into two beams, the two beams are made to intersect by a condensing optical system 102 to form an intersection, and at the intersection, an inclined fringe that is inclined with respect to the optical axis is formed. A light-receiving optical system 103 receives only the component of straight light of the forward scattered light or the backward scattered light generated at the inclined fringe. The light-receiving optical system 103 receives only the Doppler signal, which does not include the scattered light component, via a light-receiving element disposed at the focal position of the light-receiving optical system 103.
Inventors:
IWASAKI OSAMU (JP)
WATANABE RYUTA (JP)
RYUMAN KAZUAKI (JP)
WATANABE RYUTA (JP)
RYUMAN KAZUAKI (JP)
Application Number:
PCT/JP2023/031194
Publication Date:
April 25, 2024
Filing Date:
August 29, 2023
Export Citation:
Assignee:
VIENEX CORP (JP)
International Classes:
G01N21/17; G01N21/49
Attorney, Agent or Firm:
YOSHIMOTO, Tsutomu (JP)
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