Title:
IMPEDANCE ADJUSTMENT CIRCUIT
Document Type and Number:
WIPO Patent Application WO/2024/085481
Kind Code:
A1
Abstract:
The present embodiment is an impedance adjustment circuit for adjusting impedance by adjusting equivalent capacitance, the impedance adjustment circuit including: a unit leg that changes equivalent capacitance according to connection to a target capacitor, a parallel inductor connected in parallel to the unit leg, and a control unit for controlling the leg to change equivalent capacitance, the unit leg including: an adjustment capacitor of which one electrode is connected to a reference voltage rail and which is equivalently connected to the target capacitor and adjusts the equivalent capacitance; a leg voltage source; two switches connected in series to the leg voltage source; a first inductor of which one electrode is connected to a node to which the two switches are connected and of which another electrode is connected to another electrode of the adjustment capacitor; and a diode of which an anode is connected to a RF rail and provided with a RF voltage and of which a cathode is connected to the other electrode of the first inductor, so that a junction capacitance is formed between the anode and the cathode, wherein the capacitance of the adjustment capacitor is at least five times greater than the capacitance of the junction capacitor.
Inventors:
LIM CHEON YONG (KR)
SUH YONG SUG (KR)
KIM HONG MIN (KR)
SUH YONG SUG (KR)
KIM HONG MIN (KR)
Application Number:
PCT/KR2023/014411
Publication Date:
April 25, 2024
Filing Date:
September 21, 2023
Export Citation:
Assignee:
INDUSTRIAL COOPERATION FOUNDATION JEONBUK NATIONAL UNIV (KR)
International Classes:
H03H7/40; H01J37/32
Attorney, Agent or Firm:
ISIS IP LAW LLC (KR)
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