Title:
HIGH-RELIABILITY CAPACITIVE RF MEMS SWITCH
Document Type and Number:
WIPO Patent Application WO/2022/247064
Kind Code:
A1
Abstract:
The present invention provides a high-reliability capacitive RF MEMS switch, comprising a substrate, a driving member provided inside the substrate, a sliding member provided on the substrate, and a transmission member provided in the substrate. The sliding member is driven by the driving member to move; the transmission member comprises an input portion and an output portion; the sliding member moves between an input side and an output side. In the high-reliability capacitive RF MEMS switch provided by the present invention, a traditional cantilever beam type capacitive switch is changed into an in-plane sliding type capacitive switch, and on-off of a radio frequency signal is realized by utilizing the change of coupling capacitance between the sliding member and the transmission member, thereby avoiding the problem of adhesion failure caused by adhesive force, impact damage, surface effect and the like, and prolonging the service life. Moreover, spatial decoupling of the driving member and the transmission member can be achieved by means of the horizontal driving mode, the isolation degree and the operating power of the switch are remarkably improved, and the problem of crosstalk of a driving member circuit to signal output of the transmission member is solved.
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Inventors:
XIANG XIAOJIAN (CN)
YANG DEZHI (CN)
HUANG XUANYU (CN)
BAI YUDIE (CN)
ZHENG QUANSHUI (CN)
YANG DEZHI (CN)
HUANG XUANYU (CN)
BAI YUDIE (CN)
ZHENG QUANSHUI (CN)
Application Number:
PCT/CN2021/118203
Publication Date:
December 01, 2022
Filing Date:
September 14, 2021
Export Citation:
Assignee:
UNIV TSINGHUA RES INST SHENZHEN (CN)
UNIV TSINGHUA (CN)
UNIV TSINGHUA (CN)
International Classes:
H01H59/00
Foreign References:
| CN113035650A | 2021-06-25 | |||
| CN212752231U | 2021-03-19 | |||
| CN104021995A | 2014-09-03 | |||
| CN112735918A | 2021-04-30 | |||
| CN102142337A | 2011-08-03 | |||
| EP1463070A2 | 2004-09-29 |
Attorney, Agent or Firm:
SHENZHEN HUIBANG INTELLECTUAL PROPERTY AGENCY FIRM (CN)
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